The Resource Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS, Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera, (electronic resource)

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS, Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera, (electronic resource)

Label
Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS
Title
Handbook of sputter deposition technology
Title remainder
fundamentals and applications for functional thin films, nano-materials and MEMS
Statement of responsibility
Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera
Contributor
Subject
Genre
Language
eng
Summary
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere
Cataloging source
OPELS
Index
no index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • handbooks
Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS, Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera, (electronic resource)
Label
Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS, Hideaki Adachi...[et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera, (electronic resource)
Link
http://www.sciencedirect.com/science/book/9781437734836
Publication
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Antecedent source
unknown
Color
multicolored
Control code
ocn814380384
Dimensions
unknown
http://library.link/vocab/discovery_link
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Edition
2nd ed.
Extent
1 online resource
File format
unknown
Form of item
online
Level of compression
unknown
Quality assurance targets
not applicable
Reformatting quality
unknown
Sound
unknown sound
Specific material designation
remote
System control number
(OCoLC)814380384

Library Locations

    • ERDC - Vicksburg (US Army Engineer Research and Development Center) Borrow it
      3909 Halls Ferry Road, Vicksburg, MS, 39180-6199, US
      32.3019214 -90.8733482
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