The Resource Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas, M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, (electronic resource)

Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas, M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, (electronic resource)

Label
Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas
Title
Microelectronic structures and MEMS for optical processing II
Title remainder
14-15 October 1996, Austin, Texas
Statement of responsibility
M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
Contributor
Subject
Genre
Language
eng
Related
Member of
Additional physical form
Also issued in print.
Cataloging source
SPIED
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
Proceedings / SPIE--the International Society of Optical Engineering,
Series volume
v. 2881
Label
Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas, M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, (electronic resource)
Link
http://link.spie.org/PSISDG/2881/1
Publication
Alternative Format
Bibliography note
Includes bibliographical references
Control code
ocm58561737
Dimensions
28 cm.
Dimensions
unknown
Extent
v, 220 p.
Form of item
electronic
Other physical details
ill.
Reproduction note
Electronic reproduction.
Specific material designation
remote
System control number
  • (Sirsi) o58561737
  • (OCoLC)58561737

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