The Resource Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California, Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic resource)

Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California, Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic resource)

Label
Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California
Title
Process module metrology, control, and clustering
Title remainder
11-13 September 1991, San Jose, California
Statement of responsibility
Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Contributor
Subject
Genre
Language
eng
Related
Member of
Additional physical form
Also issued in print.
Cataloging source
SPIED
Illustrations
illustrations
Index
index present
Literary form
non fiction
Nature of contents
  • dictionaries
  • bibliography
Series statement
Proceedings / SPIE--the International Society for Optical Engineering, 0277-786X
Series volume
v. 1594
Label
Process module metrology, control, and clustering : 11-13 September 1991, San Jose, California, Cecil J. Davis, Irving P. Herman, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, (electronic resource)
Authority link
http://www.worldcat.org/oclc/25381898
Link
http://link.spie.org/PSISDG/1594/1
Publication
Note
Original
Bibliography note
Includes bibliographical references and index
Control code
ocm57265717
Dimensions
28 cm.
Dimensions
unknown
Extent
ix, 419 p.
Form of item
electronic
Isbn
9780819407252
Other physical details
ill.
Reproduction note
Electronic reproduction.
Specific material designation
remote
System control number
  • (Sirsi) o57265717
  • (OCoLC)57265717

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